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ICMCTF 2011 - 38TH INTERNATIONAL CONFERENCE ON METARLLURGICAL COATINGS & THIN FILMS
Four members of the the Research Department "Plasmas with Complex Interactions" and of the SFB-TR 87 attended the ICMCTF conference in San Diego. The participants were namely Teresa de los Arcos, Carles Corbella, Ante Hecimovic, and Marina Prenzel. Everybody had a contribution to this conference and the presentation had a good resonance, which supports the impact of the research within the RD Plasma respectively SFB-TR 87. As a consequence, new connections to other research groups were established.
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IXTH WORKSHOP ON FRONTIERS IN LOW TEMPERATURE PLASMA DIAGNOSTICS (FLTPD IX)
A group of 11 researchers from the Research Department „Plasmas with Complex Interactions“ and the Research Unit FOR 1123 „Physics of Microplasmas“ participated in the Workshop on Frontiers in Low Temperature Plasma Diagnostics (FLTPD IX) in Zinnowitz, Usedom (Germany). In total they presented a number of 15 contributions including 2 invited and 3 topical talks. The meeting was the IXth in a series of very successful biannual workshops and brought together experts in the field of low temperature plasma diagnostics. It was an important and fruitful opportunity for a new generation of plasma scientists to share and discuss the knowledge of these diagnostics with the leading scientists of this field.
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E-MRS 2011 SPRING MEETING
Prof. Dr. Anjana Devi hatte auf dem E-MRS 2011 Spring Meeting, welches vom 9.-13. Mai 2011 in Nizza, Frankreich stattfand, einen eingeladenen Vortrag über "Rare-earth doped HfO2 films grown by MOCVD and ALD". Hierdurch wurden sowohl das Materials Research Department (MRD) als auch das Research Department "Plasmas with Complex Interactions" repräsentiert.
Resume: Doping of rare-earth metal oxide in HfO2 has gained considerable interest especially for higher permittivity (k) dielectrics in logic and memory devices. The doping is intended to increase the crystallization temperature, stabilize the cubic phase of HfO2 and reduce the leakage currents. Another promising area is that the Gd doping of HfO2 could lead to a dilute magnetic semiconductor. Atomic layer deposition (ALD) and metalorganic chemical vapor deposition (MOCVD) are preferred techniques for growing high quality layers especially for the above mentioned applications. In this presentation, we have demonstrated the growth of rare-earth doped HfO2 films by ALD and MOCVD using the guanidinate class of precursors which possess the prerequisites for ideal ALD and MOCVD processes. The crystalline structure, microstructure and composition of the films were investigated by means of several techniques that include XRD, SEM, AFM, RBS, XPS and AES. The XRD analysis reveals that Gd doping stabilises the higher-k tetragonal phase. Optical measurements were carried out using ellipsometry and Raman spectroscopy and finally the electrical measurements were performed.
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JUN.-PROF. JAN BENEDIKT GIVES AN INVITED TALK AT SVC TECHCON 2011
The mission of the Society of Vacuum Coaters is “to promote technical excellence by providing a global forum to inform, educate, and engage the members, the technical community, and the public on all aspects of vacuum coating, surface engineering and related technologies.“ Part of this mission is a yearly organization of a TechCon conference, where experts from the academy and industry can present their work and meet each other. This year, the conference has been held in Chicago from April 16th – 21st and was featuring two symposia: Manufacturing and Technology for Thin Film Photovoltaics and Coating Advances and its Impact on the Future of the Vacuum Coating Industry. One of the traditional sessions was also devoted to High Power Impulse Magnetron Sputtering, a topic of the SFB-TR 87. Jun.-Prof. Jan Benedikt was invited to give a talk with the title "Diagnostics of Low and Atmospheric Pressure Plasmas by Means of Mass Spectrometry" in the Plasma Processing session of the conference.
Society of Vacuum Coaters
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4th Internal Workshop of FOR 1123
The fourth internal workshop of the research group FOR 1123 "Physics of Microplasmas" has been held on April 16-17, 2011 at Schlosshotel Eringerfeld. The aim of the workshop is to prepare the renewal application of FOR 1123.
http://www.for1123.rub.de/FG1123/
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6TH IWM IN PARIS VOM 3.-6. APRIL 2011
A large group of researchers from the research group participated in the 6th International Workshop on Microplasmas in Paris. In total they presented a number of 15 contributions. The intent of the workshop is to bring together researchers from around the world to report on recent progress in understanding and in controlling the properties of plasmas generated in confined geometries.
Benedikt Niermann, one of our PhD students owns one of the Best Poster Awards for his contribution entitled "Measurement and simulation of Ar and He metastable density profiles in radio-frequency micro-plasma jets" in cooperation with Torben Hemke, Marc Böke, Thomas Mussenbrock, Ralf Peter Brinkmann, and Jörg Winter. Congratulations!
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COOPERATION AGREEMENT WITH NAGOYA UNIVERSITY
Prof. Dr. Uwe Czarnetzki, as Dean of the Faculty of Physics and Astronomy, extended the cooperation agreement with Nagoya University in Japan on behalf of Ruhr-Universität Bochum in early March in Japan. This is an agreement between the RUB, the Faculty of Physics and Astronomy and the Faculty of Electrical Engineering and Information Technology with Nagoya University and the Faculty for Electrical Engineering. This involves the now indefinite continuation of a framework agreement for the exchange of students and scientists. In recent years, more than 20 students and scientists have been exchanged under the old agreement.
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Ankara
30.03.2011 - BENEDIKT NIERMANN AN DER BILKENT UNIVERSITÄT IN ANKARA, TÜRKEI
Vom 26.03.2011 bis 31.03.2011 besucht Benedikt Niermann die Gruppe von Professor Ömer Ilday am Institut für Physik der Universität Ankara, um dort gemeinsame Messungen zur Laser-gestützten Zündung von Mikroplasmen zu unternehmen. Schwerpunkte sind dabei Messungen zur Beeinflussung der Zündcharakteristik von Mikroplasmen durch Variation von Pulsenergien, Pulslängen, und Peakintensitäten faserbasierter Laser im Nano- bis Femtosekunden-Bereich. Darüber hinaus wurden erste spektroskopische Messungen mithilfe von Laser-erzeugten Superkontinuum-Spektren an einem Mikroplasma-Jet durchgeführt.
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NATO ARW: PLASMA BIO-DECONTAMINATION
Jan Lackmann, PhD student with Jun.-Prof. Julia Bandow, participated in the NATO Advanced Research Workshop: "Plasma for bio-decontamination, medicine, and food security" (NATO ARW: Plasma bio-decontamination) in Demänovská dolina, Slovakia, March 14-18, 2011. He gave a presentation on "Characterization of damage to bacteria and biomacromolecules by (V)UV radiation and particles generated by a microscale atmospheric pressure plasma jet" (Lackmann, S. Schneider, F. Narberhaus, J. Benedikt, J. Bandow).
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PLASMATECHNOLOGIETAGUNG PT15
Prof. Achim von Keudell, Dr. Tim Baloniak and Marina Prenzel represented the Research Department "Plasmas with Complex Interactions" at the Plasma Technology Conference PT15 in Stuttgart from February 28 to March 2, 2011. The conference was organized by the Institute for Plasma Research at the University of Stuttgart under the sponsorship of the German Society for Plasma Technology (DGPT) in cooperation with the Swiss Vacuum Society (SVG).
Several posters on current projects in the Research Department were presented at the meeting. These include work on the deposition of high quality aluminum oxide at low temperatures and on the control of ion energy distribution in
Low pressure plasmas. The Plasma Technology Conference has been held every two years and is an important discussion platform for representatives of plasma technology from research and industry. The Research Department was therefore brought closer to a very broad audience in Stuttgart. At the same time, the main objectives of the Collaborative Research Center SFB-TR 87 "Pulsed High-Power Plasmas for the Synthesis of Nanostructured Functional Layers" were presented to the auditorium.
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Belgrad
23.02.2011 - DR. ILIJA STEFANOVIC IN BELGRAD
Vom 22. Februar bis zum 1. März 2011 ist Dr. Ilija Stefanović zu Gast im Gaseous Electronics Laboratory des Instituts für Physik in Zemun, Belgrad. Dr. Stefanović arbeitet eng zusammen mit Dr. Zoran Lj. Petrović, Dr. Dragana Marić und Nikola Škoro. Während seines Besuchs werden die neuesten Resultate des Mikroplasma-Experimentes aus Bochum (Institut für Experimentalphysik II) diskutiert und die neuen Veröffentlichungen vorbereitet. Dieser Besuch findet in den Rahmen des DAAD-Austauschprojekts „Räumliche Struktur von Nicht-Gleichgewichts-Mikroentladungen“ zwischen dem Institut für Experimentalphysik II, RUB, und dem Instituts für Physik, Belgrad, statt.