Diagnostic Methods

• Fourier-Transform Infrared Spectroscopy (FTIR)
• X-ray Photoelectron Spectroscopy (XPS)
• Mocon
• Scanning Electron Microscope (SEM)
• Defect diagnostics
• Multi Resonance Probe (MRP)/Plasma Absorption Probe (PAP)
• Energy Resolved Mass Spectrometry
• Phase Resolved Optical Emission Spectrscopy (PROES)