SEM

The JEOL JSM-6510 is a Scanning Electron Microscope (SEM). It achieves visualization of a sample by irradiating a focused beam of electrons producing secondary electrons at the surface. Collecting the secondary electrons by means of a detector results in an image of the topography. This enables scanning of a sample with a magnification of up to x300.000 with a resolution of 3 nm using a 30 kV electron beam. The accelerating voltage can be varied between 0.5 and 30 kV.