FACULTY OF Physics and Astronomy

DR. DIRK LUGGENHÖLSCHER, CHAIR OF EXPERIMENTAL PHYSICS V

Central part of the research is the investigation of low temperature, non-equilibrium plasmas. These plasmas, either low or atmospheric pressure, are of technological relevance and due to their unique features widely used in semiconductor manufacturing, material processing, plasma chemistry or medicine. Different plasma sources are examined: low-, radio- or microwave-frequency plasmas. The energy coupling into the plasma is capacitively, inductively or by electromagnetic waves. The essential aim is understanding the physics of these plasmas. There-fore, the determination of as many as possible plasma parameters like density and velocity of electrons and ions, electric fields, currents and potentials is pursued. In order to do so, different diagnostics are applied and also de-veloped, e.g. various kinds of laser spectroscopy, emission spectroscopy, electrical measurements.

Keywords: plasmas, plasma diagnostics, laser, spectroscopy

Webpage: Experimental Physics V