FACULTY OF Electrical Engineering and Information technology

PROF. DR. PETER AWAKOWICZ, CHAIR FOR ELECTRICAL ENGINEERING AND PLASMA TECHNOLOGY

A diverse spectrum of research is addressed. It includes atmospheric pressure plasmas combined with catalysts for air and gas purification (e.g., CRC 1316, Carbon2Chem) or atmospheric pressure plasmas for the deposition of light metal oxides. Furthermore, atmospheric pressure plasmas for disinfection and sterilisation, wound healing, cancer treatment (PlasNow) are investigated. Another research focus are low pressure plasmas for deposition of SiO2 layers on plastics for barrier and membrane applications or Low-pressure plasmas for the deposition of metal oxynitrides (SFB-TR 87). Finally, quantitative plasma diagnostics with optical, mass spectrometric and electrical methods realized within the research institute.

Keywords: Electrical engineering, low pressure plasmas, atmospheric pressure plasmas, plasma deposition

Webpage: Chair of Electrical Engineeringd and Plasma Technology