Wisconsin-Madison

16.05.2012 - SARA GALLIAN VISITED PROF. HIT­CHON AND PROF. KUSH­NER

Du­ring the last week of April, Sara Gal­li­an, re­se­arch as­sis­tant at TET In­sti­tu­te wor­king in the SFB-TR 87 frame­work, has vi­si­ted Prof. Hit­chon and Prof. Kush­ner to di­s­cuss on the si­mu­la­ti­on of the HPPMS pro­cess. Nick Hit­chon is a Pro­fes­sor at the Uni­ver­si­ty of Wis­con­sin-Ma­di­son and an ex­pert in the field of ki­ne­tic plas­ma si­mu­la­ti­ons. He is co­ope­ra­ting with the TET group on the phe­no­me­no­lo­gi­cal mo­de­ling of the re­cent­ly ob­ser­ved ro­ta­ting in­sta­bi­li­ty du­ring the HPPMS ope­ra­ti­on. Mark Kush­ner is a Pro­fes­sor at the Uni­ver­si­ty of Mi­chi­gan and is head of the Com­pu­ta­tio­nal Plas­ma Sci­ence and En­gi­nee­ring Group (CPSEG) in the De­part­ment of Elec­tri­cal and Com­pu­ter En­gi­nee­ring. Prof. Kush­ner is a well known ex­pert in the field of Hy­brid Mo­del­ling and the main de­ve­loper of the Hy­brid Plas­ma Equip­ment Model (HPEM). HPEM is a com­pre­hen­si­ve mo­de­ling plat­form for low pres­su­re plas­ma pro­ces­sing re­ac­tors, ca­pa­ble of ad­dres­sing Ma­gne­tron sput­ter and Io­ni­zed Metal Phy­si­cal Vapor De­po­si­ti­on (IMPVD). Du­ring the visit, it was di­s­cus­sed the pos­si­bi­li­ty use HPEM in the preli­mi­na­ry si­mu­la­ti­on of the HPPMS di­sch­ar­ge.

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