Guest Experimental Physics II - Prof. von Keudell



Prof. Stéphane Lucas von der Namur Universität, Belgien, besucht den Lehrstuhl für Experimentalphysik II am Donnerstag, den 26. November 2015, um die ersten Ergebnisse unserer Kooperation zu präsentieren. Um 14:00 Uhr wird er im Seminarraum NB 5/158 einen Vortrag halten über "On the understanding of state of the art deposition methods like HiPIMS in order to predict film properties by Monte Carlo simulations".
Dazu möchten wir euch gerne recht herzlich einladen! Von unserer Seite wurden Titanschichten auf Silizium und die dazugehörigen IEDFs während HiPIMS geliefert. Die Bestimmung der Morphologie, sowie der Dichte und des Elastizitätsmoduls sowie der Vergleich mit den Modellrechnungen wurde von seinem Team durchgeführt.

S. Lucas1, P. Moskovkin1, A. Pflug2, C. Maszl3, A. von Keudell3
1 The University of Namur, Physics of Matter and Radiation (PMR), 61 rue de Bruxelles, B-5000 Namur, Belgium
2 Fraunhofer Institute for Surface Engineering and Thin Films IST, Bienroder Weg 54e, 38108 Braunschweig,
3 Ruhr-Universität Bochum, Fakultät für Physik und Astronomie, Universitätsstraße 150, D-44780 Bochum

Substrate ion bombardment during deposition plays a major role in thin film microstructure evolution. This has been one of the driving force for the development of state of the art deposition methods like high power impulse magnetron sputtering (HiPIMS) plasmas that generate energetic metal ions at the substrate as compared to conventional direct current magnetron sputtering (dcMS).
In the present study we investigate, by means of computer simulation and experimental validation, the growth of Ti films deposited by such a technique. The simulation work is done using NASCAM, which is a computer program based on kinetic Monte carlo of atomistic deposition. Kinetic Monte Carlo method allows to follow the evolution of large system of particles during longer times, up to 103 s, with relatively low computational effort compared to other techniques, like Molecular dynamic or even other Monte Carlo methods. This Virtual CoaterTM has been recently completed with a mechanical plugin to estimate the mechanical properties of films grown in silico. The code is built to calculate the effective Young’s moduli and Poisson’s ratios of a porous multilayered structure, using the classical formula "Rule of Mixture" (ROM), considering the Voigt’s model (longitudinal components) and Reuss’ model (transversal components).
Special attention is given to investigate the role of high energy particles flux on the properties of Ti films deposited by HiPIMS. Various films were grown at various power densities and for each, the energy distribution of the sputtered Ti+ and Ti2+ ions at the substrate were measured with a temporal resolution of 2 μs experimentally. Special care was given for conditions below and above the runaway regime. The surface morphology (AFM), density (RBS), and Young modulus (Nano-indentation) of the deposited films are compared with the simulated one.

Stéphane Lucas



On Tuesday, October 6th 2015, Prof. José-María Albella Martín is going to give a tutorial about Thin Film Growth Phenomena. SFB members and all other interested persons with at least a master's degree are highly welcome.
Prof. Albella's tutorial (Thin Film Growth Phenomena) is going to deal with microscopic processes associated with thin film deposition, from the early stages of atom adsorption, nucleation, etc. to vertical growth of films showing different micro/nanostructures. These topics are going to be treated from a phenomenological perspective by using thermodynamic principles. Finally, the effects of the deposition conditions (pressure, temperature, deposition rate, impurities, etc) on the morphological and structural properties of the films are going to be discussed.
Dr. Albella is Senior scientist at the Surface Physics and Engineering Dept. (Institute of Materials Science, CSIC). Before, he has been a Professor at the Applied Physics Department (Universidad Autónoma de Madrid) where he taught several graduate and doctorate courses on semiconductors, electronic materials and thin films. Presently, he conducts a research group devoted to the study of ceramic coatings for surface treatments for tribological applications (mechanical parts, tools, etc.), using PVD and CVD techniques (sputtering, plasmas, ion beams, etc.).
His course will be taught on Tuesday, October 6th, in the classroom ID 04/401, and it has two parts:
Part I: Nucleation on the surface (10:30 - 12:00)
Lunch (12:00-13:00)
Part II: Vertical growth (13:00-14:30)
In order to register please send and email to This email address is being protected from spambots. You need JavaScript enabled to view it..



01.09.2015 - GAST: ATTA UL HAQ

Doktorand Atta Ul Haq von der University of Ulster (UK) ist zwei einhalb Monate (14.9.-30.11.) zu Gast bei Lehrstuhl für Experimentalphysik II. Im Rahmen seines RAPID-Projektes "Microplasma-based synthesis of composite semiconducting nanoparticles" arbeitet er zusammen mit Master-Student Philip Lucke.



23.06.2015 - GAST: DR. MAHDI SHIRAZI 

Dr. Mahdi Shirazi from Universiteit Antwerp is a Marie Curie ITN RAPID fellow and gives a presentation during his secondment at the Ruhr-University Bochum on Monday, June 29th, 2015 at 9:15 am, NB 5/158 (Seminarraum EP2). His talk is about Multi-scale modelling of plasma catalysis.
n this research, the interaction of free radical species with a Ni catalyst surface were studied by density functional theory (DFT) calculations, and this information is now being implemented in a kinetic Monte Carlo model, to study the catalytic mechanisms.
He comes from the research group PLASMANT. The research group is part of the chemistry department, and belongs to the center-of-excellence NANO of the University of Antwerp. The group specialized in computer modeling of plasmas and plasma-surface interactions, for applications in material science, the microelectronic, medical and environmental applications (plasma catalysis).
Anybody interested, is welcome to join!

Photo: Mahdi Secondment Manchester



15.06.2015 - GAST: DR. DAVID NECAS

Dr. David Necas from Masaryk University in Brno (group of Lenka Zajickova), Czech Republic, will hold within our Material group meeting a short talk on the topic "Mapping of thin film properties using imaging spectrophotometry". The meeting is on June 16th, 2015, at 9:15 in NB 5/131.
Everybody is invited. 

Masaryk University in Brno